Hitachi NB 5000 Dual Beam FIB-SEM (Focused Ion Beam - Scanning Electron Microscope)
- Premium System
- Single Phase
- 50/60 Hz
- 8kVA
- 200 / 208 / 230 Vac
- SEM Resolution: 1.0nm @ 15Kv - FIB Resolution: 5nm @ 40Kv Main Unit Includes: - (1) F IB Column - Vacc - 1Kv - 40Kv - Ga lon Source >50nA Max Beam Current (Operable) - Max Current Density - 50A/cm2 minimum - 2-Stage Electro Static Lens System - Octo pole Electro Static Lens System - Aperture -Motor Drive CPU controlled System (Automated) - 4K X 4K Pattern Generator System - Section View Function - for low-K material observation - Real Time Monitoring Function During - Fabrication (Live Fabrication) - Mill & Monitor (M&M) Function (2) SEM Column
- Vacc- 0.5Kv - 30Kv
- ZrO/W Schottky - Emission Electron Gun
- Max Beam Current - >30nA
- HV Tank(SE)
- 3 Stage Electro Magnetic Lens Reduction System
- Electro Static Blanking System
- Everhart Thornley Upper Detector System
- ET (Plus) Lower Detector System
-for ion beam and electron beam imaging /real time fabrication
- Signal mixing for SE/BSE/ExB with user controlled electron energy detection biasing
- SE Power Supply
- Self Cleaning Type Thin-Film Objective Aperture
- 2560 X 1920 Image Memory
- Dual Monitor Simultaneous Display
(3) Vacuum System
- Turbo Molecular Pump (300 l/s)
- Dry Pump (Without Cover) (250 I/s @60hz) (part# 427-0043)
- Accessory Kit for Dry Pump
- Ion source chamber Ion pump (20 I/s)
- Getter Pump (100 l/s)
- Electron gun chamber Ion pump (30 l/s)
- Intermediate chamber Ion pump (30 l/s)
- Anti-Vibration accessory Kit
- Two Buffer Tanks
2018 Vintage