Wentworth Pegasus S 200 FA Prober
- Automated
- Drive Type: Stepper motors
- Z Travel: 18 mm
- Material: Nickel plated steel
- Graphic user interface: Windows 7.8.1 & 10
Communication interfaces:
- PC: TTL, RS 232, GPIB (IEEE 488.2), Ethernet
Utilities:
- Power: 100-240 VAC, 50/60 Hz, select 600 V A
- Vacuum: 0.5 cfm @ 20" Hg (min)
- Compressed air: 4 bar min
Shielding:
- Light: > 120 db
- EMI: > 20 db 0.05 - 0.5 Ghz, 30 db 0.5 - 3 Ghz
Weight:
- Prober: 155 kg
- Controller: 13 kg
Chuck Stage (X-Y):
- Precision ball-screw & stepper motors
- Travel: 210 x 314 mm
- Resolution: 0.312 µm
- Repeatability: +/- 4.0 µm
- Accuracy: +/- 5.0 µm
- Planarity: 8.0 µm
- Maximum Speed: 100 mm/sec
Z Stage:
- Precision ball-screw & stepper motors
- Travel: 11 mm
- Resolution: 0.156 µm
- Repeatability: +/- 1.0 µm
Theta Stage:
- Travel: +/- 8.0°
- Resolution: 0.15 µm
Programmable Microscope Mount:
- Stepper motors
- Travel: 50 x 50 x 100 mm
- Resolution: 0.15 µm
- Repeatability: +/- 1.0 µm
- Accuracy: +/- 2.5 µm