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Applied Materials 9500 Ion Implanter

Asset #: 138541

Make: Applied Materials

Model: 9500

Wafer Sizes: 6 inch

Last Confirm Date: August 15, 2025

Applied Materials 9500 Ion Implanter, 6"
- Line Frequency: 60 Hz
- Utilities: Top
- Wafer Fittings: Imperial
- Remote Distance: 6 m umbilical
- Layout: Through wall
- Wafer Cassette: 25 Wafers
- Leybold Turbo Pump
- Edwards Mech Pump
- CTI Helix Onboard Cryo Pump
- Second Compressor: Yes 9600 (2)
- Helium Line Length: 15 m
- Wafer Orienter: Yes
- Tilt Angle: Variable 0-7
- Wheel Type: Standard
- Source Type: Bernas
- Front Plate: Tungsten
- Extraction Type: Single Bellows
- Source Chamber Liners
- MRS Chamber Liners
- Gas Position 1: N/A
- Gas Position 2: N/A
- Gas Position 3: Phosphine
- Gas Position 4: Arsine
- TFT Monitor Upgrade
- No hydrogen generator
- No TEM
- No vaporizers
- No toxic gas alram
- No VESDA
- No Auto Cryo Purge
- No RGA

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