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Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper
Veeco / Ultratech Saturn Spectrum 3 Stepper

Veeco / Ultratech Saturn Spectrum 3 Stepper

Asset #: 137866

Make: Veeco / Ultratech

Model: Saturn Spectrum 3

Wafer Sizes: 5, 6, 8 inch

Last Confirm Date: August 05, 2025

Veeco / Ultratech Saturn Spectrum 3 Stepper, 5", 6", 8"
- 12 Slot reticle library
- Genmark robot and robot controller
- Genmark prealigner
- MVS and WAS alignment
- Wavelength filter pack
- Illuminator (1)
- Lamp type: Ushio USH 1003 FA, P/N: 5000533
- Chamber: Rasco TBW UD 60 S
- Reticle size: 6"
- Broaband (GHI) light intensity with new lamp is ~1430 mW/cm2
- I-Line light intensity with the new lamp is ~460 mW/cm2
- Chamber model: Rasco TBW UD 60 S
2001 Vintage

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