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Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter
Axcelis NV GSD VHE Implanter

Axcelis NV GSD VHE Implanter

Asset #: 137549

Make: Axcelis

Model: NV GSD VHE

Wafer Sizes: 6 inch

Last Confirm Date: July 29, 2025

Axcelis NV GSD VHE Implanter, 6"
- Wheel type: Full disk 17 wafers
- Wafer tilt
- Source: Bernas
- Extraction system: Triple axes
- Gases: Arsenic, Boron, Phosphine (SDS), all bottles removed. There is also present plumbing for one Xe bottle.
- SDS Gas box
- Max implantation energy (in KeV): 4.2 MeV (14 resonator configuration).
- Max Extraction voltage (in KeV): 90
- Heat Exchanger
- Orienter type: flat
- Hydrogen implantation available: no
- Load and unload locks
- Source extraction alignment jig
- AMU
- Beamline column
- Mechanical clamp
- PFS: HD
- Affinity Triple Chiller
- Power distribution unit
- Gas box terminal
- Source and analyzer terminal
- Linear module
- Cell control
- Final energy magnet
- Disk module
- End-station module
- Compressor and backing pumps
- Manuals
- Doors
- Panels
- Software version: 5.6, running on a Sun SparcStation5 with O/S V 3.8.3

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