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Lam TCP 9600 Metal Etcher

Asset #: 137261

Make: Lam

Model: TCP 9600

Wafer Sizes: 8 inch

Last Confirm Date: July 23, 2025

Lam TCP 9600 Metal Etcher, 8"
- Refurbished
- Can convert 6 or 8 system
- Mounting: Bulkhead
- Software: Envision 1.52
- Indexers: HINE
- AC Box: -001
- Gas Box: Orbital Welded
- Clamping: ESC
- Backside Helium: Closed Loop
- Generator: 3 RFG 1250
- RF Match: Upper TCP, Lower Mini Match, DSQ Match
- Turbo: Seko Seki 1000L
- Turbo Controller: Seki Seki STP
- VAT Gate: VAT 65
- VAT Controller: PM-7
- Dual Endpoint: 703 nm & 520 nm
- DSQ: Hinged
- WVDS: Auto Fill
- APM: Standard
- MFCs: Unit 1660
Gas Config:
- Gas 1: Cl2 200
- Gas 2: BCL3 100
- Gas 3: SF6 100
- Gas 4 : N2 50
- Gas 5: N2 1000
- Gas 6: Ar 1000
- Gas 7: O2 1000
- Gas 8: CF4 200
- Gas 9: H20 500

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