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Lam 4420 Oxide Etcher

Asset #: 137257

Make: Lam

Model: 4420

Wafer Sizes: 8 inch

Last Confirm Date: July 23, 2025

Lam 4420 Oxide Etcher, 8"
- Refurbished
- Can convert to a 6 or 8 system
- Mounting: Bulkhead
- Software: Envision 1.52
- Indexers: HINE
- AC Box: -002
- Gas Box: Orbital Welded
- Clamping: Non-Clamp
- Backside Helium: N/A
- Generator: OEM 650
- RF Match: Mini Match
- Endpoint Detector
- MFCs Unit 1660
Gas Config:
- Gas 1: HBR 200
- Gas 2: CL2 200
- Gas 3: SF6 500
- Gas 4: C2F6 500
- Gas 5: HE 500
- Gas 6: O2 100

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