{"product_id":"136708","title":"KLA RS 75 Sheet Resistance Measurement","description":"KLA RS 75 Sheet Resistance Measurement\u003cbr\u003e- With Auto Loader\u003cbr\u003e- Fully Refurbished\u003cbr\u003e- Meets OEM Specifications\u003cbr\u003e- Optional 100-200 mm Open Cassette\u003cbr\u003e- Cassette to Cassette Handling\u003cbr\u003e- Measurement Range: 5 mΩ\/sq - 5 MΩ\/sq\u003cbr\u003e- Repeatability (VLSI): \u0026lt; 0.2% (1σ)\u003cbr\u003e- Accuracy (VLSI): ±1%\u003cbr\u003e- Edge Exclusion: 3 mm from edge of film\u003cbr\u003e- Throughput (5-site): 100 WPH\u003cbr\u003e- Alignment System: Notch\/Flat aligner on Probe Arm\u003cbr\u003e- Computer OS: DOS Software: Rev 6.22\u003cbr\u003e- Analyze sheet resistance data on various conductive layers (such as implants, diffusion, epi, CVD, metals, \u0026amp; bulk substrates)\u003cbr\u003e- Provides accurate and repeatable sheet resistance measurements on 2-inch to 8-inch wafers ","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45228579979454,"sku":"136708","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2-2_440c83b6-8659-4705-a8c5-2638d97ce968.jpg?v=1753123798","url":"https:\/\/www.bridgetronic.com\/products\/136708","provider":"Bridge Tronic Global","version":"1.0","type":"link"}