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KLA RS 75 Sheet Resistance Measurement
KLA RS 75 Sheet Resistance Measurement

KLA RS 75 Sheet Resistance Measurement

Asset #: 136708

Make: KLA

Model: RS 75

Last Confirm Date: July 17, 2025

KLA RS 75 Sheet Resistance Measurement
- With Auto Loader
- Fully Refurbished
- Meets OEM Specifications
- Optional 100-200 mm Open Cassette
- Cassette to Cassette Handling
- Measurement Range: 5 mΩ/sq - 5 MΩ/sq
- Repeatability (VLSI): < 0.2% (1σ)
- Accuracy (VLSI): ±1%
- Edge Exclusion: 3 mm from edge of film
- Throughput (5-site): 100 WPH
- Alignment System: Notch/Flat aligner on Probe Arm
- Computer OS: DOS Software: Rev 6.22
- Analyze sheet resistance data on various conductive layers (such as implants, diffusion, epi, CVD, metals, & bulk substrates)
- Provides accurate and repeatable sheet resistance measurements on 2-inch to 8-inch wafers

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