{"product_id":"136194","title":"Samco RIE 200 IP Etcher","description":"Samco RIE 200 IP Etcher\u003cbr\u003e- Manual loading \/ unloading\u003cbr\u003eGas Box:\u003cbr\u003e- GAS 1: Area FC-260E 100 SCCM CF4\u003cbr\u003e- GAS 2: Area FC-260E 25 SCCM CHF3\u003cbr\u003e- GAS 3: Area FC-260E 25 SCCM Ar\u003cbr\u003e- GAS 4: Area FC-260E 200 SCCM o2\u003cbr\u003e- GAS 5: He\t\t\t\u003cbr\u003e- Piezo Valve(Gas 5): Horiba PV-1001MC\u003cbr\u003e- Pressure Transducer (Gas 5): MKS 852 B 12 TCA 2 GC\u003cbr\u003eTurbo Pump\u003cbr\u003e- Turbo Molecular Pump: Shimadzu\t\u003cbr\u003e- TMP-1003lmc TMP Power Unit: Shimadzu E l-D 1003 M\u003cbr\u003eRF System:\u003cbr\u003e- RF Plasma Generator 1: Adtec Ax-300III-El RF \u003cbr\u003e- Plasma Generator 2: Adtec Ax-1000III RF \u003cbr\u003e- Matching Box: Amv-500s12-B\u003cbr\u003eTransfer Stepping Motor: \u003cbr\u003e- Vexta PK 543 B W1-H 50\u003cbr\u003e- ESC Control: FTE PSESC-B1\u003cbr\u003eControl System:\u003cbr\u003e- APC 1: Vat 641pm-26bg-Abb1\/0008 \u003cbr\u003e- APC 2: Horiba Pcu-2100 Ver.1.1\u003cbr\u003ePressure Control:\u003cbr\u003e- Crystal Gauge: Anet M-320xg\u003cbr\u003e- Capacitance Manometer: MKS 627b.1TBD1B Ion \u003cbr\u003e- Gauge: Anet M-310hg\u003cbr\u003e- Gate Valve: Vat 02107-Ce24-Apu1\u003cbr\u003eDry Bump:\u003cbr\u003e- Dry Vacuum Bump: Ulvac HR 60\u003cbr\u003eChiller:\u003cbr\u003e- Chiller: Eyela CA-1116 A\u003cbr\u003ePower:\u003cbr\u003e- 3 Phase\u003cbr\u003e- 200 V\u003cbr\u003e- 8.5 KVA","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45212424503486,"sku":"136194","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/0209_1.jpg?v=1770738222","url":"https:\/\/www.bridgetronic.com\/products\/136194","provider":"Bridge Tronic Global","version":"1.0","type":"link"}