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Samco RIE 200 IP Etcher
Samco RIE 200 IP Etcher
Samco RIE 200 IP Etcher
Samco RIE 200 IP Etcher

Samco RIE 200 IP Etcher

Asset #: 136194

Make: Samco

Model: RIE 200 IP

Last Confirm Date: July 11, 2025

Samco RIE 200 IP Etcher
- Manual loading / unloading
Gas Box:
- GAS 1: Area FC-260E 100 SCCM CF4
- GAS 2: Area FC-260E 25 SCCM CHF3
- GAS 3: Area FC-260E 25 SCCM Ar
- GAS 4: Area FC-260E 200 SCCM o2
- GAS 5: He
- Piezo Valve(Gas 5): Horiba PV-1001MC
- Pressure Transducer (Gas 5): MKS 852 B 12 TCA 2 GC
Turbo Pump
- Turbo Molecular Pump: Shimadzu
- TMP-1003lmc TMP Power Unit: Shimadzu E l-D 1003 M
RF System:
- RF Plasma Generator 1: Adtec Ax-300III-El RF
- Plasma Generator 2: Adtec Ax-1000III RF
- Matching Box: Amv-500s12-B
Transfer Stepping Motor:
- Vexta PK 543 B W1-H 50
- ESC Control: FTE PSESC-B1
Control System:
- APC 1: Vat 641pm-26bg-Abb1/0008
- APC 2: Horiba Pcu-2100 Ver.1.1
Pressure Control:
- Crystal Gauge: Anet M-320xg
- Capacitance Manometer: MKS 627b.1TBD1B Ion
- Gauge: Anet M-310hg
- Gate Valve: Vat 02107-Ce24-Apu1
Dry Bump:
- Dry Vacuum Bump: Ulvac HR 60
Chiller:
- Chiller: Eyela CA-1116 A
Power:
- 3 Phase
- 200 V
- 8.5 KVA

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