{"product_id":"136191","title":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003eGas Box:\u003cbr\u003e- Gas 1 MKS 1479A 5%SiH4\/N2 1000 SCCM \u003cbr\u003e- Gas 2 MKS 1479A NH3 100 SCCM\u003cbr\u003e- Gas 3 MKS 1179A N2 2000 SCCM \u003cbr\u003e- Gas 4 MKS 1179A N2O 3000 SCCM \u003cbr\u003e- Gas 5 MKS 1179A O2 300 SCCM\u003cbr\u003e- Gas 6 MKS 1179A Ar 500 SCCM（TEOS carrier gas） \u003cbr\u003eTeos Thermotank:Thermocenter Salvis LAB\u003cbr\u003eChamber Configuration:\u003cbr\u003e- Chuck φ202mm（ φ2’φ4’φ6’φ8’）\u003cbr\u003e- Shower head φ225mm\u003cbr\u003eRF System:\u003cbr\u003e- RF Generator：AE RFX600A Match Box:Opt AMU Oxford\u003cbr\u003e- LF Generator LF-5\u003cbr\u003e- Match Box: Manual Transfor UP\u003cbr\u003ePressure Control:\u003cbr\u003e- Valve:Vat 12036-PA44 MKS \u003cbr\u003e- Valve Control: 253b\u003cbr\u003eTurbo Pump:\u003cbr\u003e- Alcatel ACT200T Control Unit \u003cbr\u003e- Alcatel ATP 80\/100 Turbo Pump\u003cbr\u003eLL Chamber:\u003cbr\u003e- φ2’φ4’φ6’φ8’single Wafer Auto Transfer \u003cbr\u003e- Slit Valve:VAT 02110-BA24-AQZ1\u003cbr\u003e- Pirani Gauge:Edwards APG-L-NW16 \u003cbr\u003e- Vaccum Gauge :Edwards AIM-S-NW25\u003cbr\u003eDry Pump: Edwards QDP40 \u003cbr\u003eSystem Control: HP PC system，Windows XP\u003cbr\u003ePower: \u003cbr\u003e- 208VAC 3Phase \u003cbr\u003e- Full Load:25amps","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45212424405182,"sku":"136191","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_5_352dd4a9-a3f8-4897-95cd-48728b9c8a95.jpg?v=1774367286","url":"https:\/\/www.bridgetronic.com\/products\/136191","provider":"Bridge Tronic Global","version":"1.0","type":"link"}