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Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 136191

Make: Oxford

Model: Plasmalab 100

Last Confirm Date: March 24, 2026

Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Gas Box:
- Gas 1 MKS 1479A 5%SiH4/N2 1000 SCCM
- Gas 2 MKS 1479A NH3 100 SCCM
- Gas 3 MKS 1179A N2 2000 SCCM
- Gas 4 MKS 1179A N2O 3000 SCCM
- Gas 5 MKS 1179A O2 300 SCCM
- Gas 6 MKS 1179A Ar 500 SCCM(TEOS carrier gas)
Teos Thermotank:Thermocenter Salvis LAB
Chamber Configuration:
- Chuck φ202mm( φ2’φ4’φ6’φ8’)
- Shower head φ225mm
RF System:
- RF Generator:AE RFX600A Match Box:Opt AMU Oxford
- LF Generator LF-5
- Match Box: Manual Transfor UP
Pressure Control:
- Valve:Vat 12036-PA44 MKS
- Valve Control: 253b
Turbo Pump:
- Alcatel ACT200T Control Unit
- Alcatel ATP 80/100 Turbo Pump
LL Chamber:
- φ2’φ4’φ6’φ8’single Wafer Auto Transfer
- Slit Valve:VAT 02110-BA24-AQZ1
- Pirani Gauge:Edwards APG-L-NW16
- Vaccum Gauge :Edwards AIM-S-NW25
Dry Pump: Edwards QDP40
System Control: HP PC system,Windows XP
Power:
- 208VAC 3Phase
- Full Load:25amps

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