Skip to content
Skip to product content
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System
Ulvac EBX 1000 High Vacuum Evaporation System

Ulvac EBX 1000 High Vacuum Evaporation System

Asset #: 136153

Make: Ulvac

Model: EBX 1000

Last Confirm Date: March 27, 2026

Ulvac EBX 1000 High Vacuum Evaporation System
- 3 Phase
- 5 kVA
- 200V
- 60 Hz
- Cryopump: Ulvac Cryo-U10PU
Motor:
- Oil Rotary Vacuum Pump: Ulvac D-9500K
- Oil Mist Trap: Ulvac TMX-Z
- Speed Control Motor 1: OM MBM 206-411
- Gear Head 1: Om 2GN120K
- Speed Control Motor 2: OM 5IK40RGN-A
- Gear Head 2: OM 5GN60K
- Speed Controller: OM DSP501M
- Control Pack: Om SS21M-SSSD
Control System:
- Ionization Vacuum Gauge Control: Ulvac GI-Tl3RY
- Deposition Control: Ulvac CRTM-9000
- Pro-Face GP577R-TC11
- Emission Control: Ulvac EGC-10s
- Heating Electric Power: Shimaden PSH-075TN
- Program Controller: Chino DP
Pressure Control:
- Up/Down Cylinder: SMC CDQ2F63-115DCM-A73
- Pressure Regulating Valve 1: SMC AW4000-02BDG 0.05-0.85mpa
- Pressure Regulating Valve 2: SMC AR3000-03BG-1 0.02-0.2mpa
- Check Valve 1: SMC INA-14-47-02
- Check Valve 2: SMC INA-14-47-04
- High Vacuum Valve 1: SMC XLC-50-F9NA
- High Vacuum Valve 2: SMC XLC-40-F9 NA
- Vacuum Gauge: Ulvac WP-01
- Vacuum Gauge: Sensor: Ulvac WIB
2002 Vintage

Recommended Products


Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.


Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA andΒ Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Cart

Your cart is currently empty