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KLA 2351 Inspection System
KLA 2351 Inspection System
KLA 2351 Inspection System

KLA 2351 Inspection System

Asset #: 134989

Make: KLA

Model: 2351

Wafer Sizes: 8 inch

Last Confirm Date: June 20, 2025

KLA 2351 Inspection System, 8"
- With HDD & Software
- External Blower
- Power Line Conditioner
- Load Port Qty : 2
- Wavelength Illumination: 370~720 nm
- Wavelength Band: Visible, UV
- Pixel Size: 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm
- Array Defect Capture Rate: ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)
- Array False Defect Rate: ≤1.5%(all sizes)
- Random Defect Capture Rate: ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)
- Random False Defect Rate: ≤1.5% (all sizes)
- Repeatability: ≥90% (20 consecutive run on the same DSW wafer)
User Interface:
- Monitor
- Workstation
- Keyboard, Trackball, Joystick
Main Body:
- Inspection Station
- Wafer Transfer System
- Stage
2002 Vintage

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