{"product_id":"134685","title":"Hitachi Kokusai DD 823 V Vertical Diffusion Furnace","description":"Hitachi Kokusai DD 823 V Vertical Diffusion Furnace, 8\"\u003cbr\u003e- Process: H2 Anneal\u003cbr\u003e- System Layout: Main, Utility\u003cbr\u003e- System Type: L Type\u003cbr\u003e- No Side Maintenance\u003cbr\u003e- System Paint Color: Ivory\u003cbr\u003e- Furnace Front Surface Finish: Painted\u003cbr\u003e- Rapid Cooling Unit: Not Installed\u003cbr\u003e- N2 Load Lock: Not Installed\u003cbr\u003e- O2 Analyzer: Not Installed\u003cbr\u003e- Cassette I\/O Type: SMIF\u003cbr\u003e- SMIF: Asyst \/ Indexer 2200\u003cbr\u003e- AVG Compatibility: Unable\u003cbr\u003e- System Main Controller: CX 3002 A\u003cbr\u003e- Mechanical Controller: CX 1215-1, 1215-2\u003cbr\u003e- Sequence Controller: CX 1312\u003cbr\u003e- Gas Controller: CX 3201 B\u003cbr\u003e- Gs Flow Chart Panel: Installed (Front)\u003cbr\u003e- Operational Panel: Installed (Front)\u003cbr\u003e- Signal Tower\/ colors: Not Installed\u003cbr\u003e- Furnace Temperature Controller: CQ 1600\u003cbr\u003e- Furnace Over-temp Detector: DN 150\u003cbr\u003e- Gas Detector: Riken Keiki GD-V 11 D\u003cbr\u003e- Detecting Gas: H2\u003cbr\u003e- Host Communications: Yes\u003cbr\u003e- User Host Computer I\/F: HSMS\u003cbr\u003e- Manual (Drawing, Parts List, etc.): Not Included\u003cbr\u003eGas System:\u003cbr\u003e- Process Gas: N2, H2\u003cbr\u003e- Basic Style: Integrated Gas System (Fujikin)\u003cbr\u003e- Manual Valve: Fujikin\u003cbr\u003e- Air Operated Valve: Fujikin\u003cbr\u003e- Filter: Pall\u003cbr\u003e- Regulator: Tanaka Engineering\u003cbr\u003e- MFC: Area \/ FC 786, FC 866\u003cbr\u003e- PT Sensor: Nagano Keiki \/ GC 84, GC 94\u003cbr\u003e- Check Valve: Installed\u003cbr\u003e- Baking system: Not Installed\u003cbr\u003e- Liquid Source Auto-Refill: Not Installed\u003cbr\u003e- Burn Controller: Not installed\u003cbr\u003e- Vaporizer: Not Installed\u003cbr\u003eVacuum \/ Exhaust System:\u003cbr\u003e- Pump: Not Installed\u003cbr\u003e- Pressure Control Valve: Not installed\u003cbr\u003e- Pressure Controller: Not Installed\u003cbr\u003e- Pressure Sensor: Not Installed\u003cbr\u003e- Trap: Not Installed\u003cbr\u003e- Gas Cooler: Not installed\u003cbr\u003eWafer \/ Cassette Handling:\u003cbr\u003e- Auto Wafer Aligner: Not Installed\u003cbr\u003e- Wafer Qty in Cassette: 26\u003cbr\u003e- Cassette Storage Qty: 24\u003cbr\u003e- Fork Type: 1 + 4 (VAC)\u003cbr\u003e- Fork-Wafer Presence Sensor: Installed\u003cbr\u003e- Fork-Variable Pitch: Installed\u003cbr\u003e- Magnetic Seal Rotation: Not installed\u003cbr\u003e1997 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45140330905790,"sku":"134685","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_927a937e-cf04-41a6-a1fa-191b8d98d442.jpg?v=1749840806","url":"https:\/\/www.bridgetronic.com\/products\/134685","provider":"Bridge Tronic Global","version":"1.0","type":"link"}