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Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace
Hitachi Kokusai DD 823 V Vertical Diffusion Furnace

Hitachi Kokusai DD 823 V Vertical Diffusion Furnace

Asset #: 134685

Make: Hitachi Kokusai

Model: DD 823 V

Wafer Sizes: 8 inch

Last Confirm Date: June 13, 2025

Hitachi Kokusai DD 823 V Vertical Diffusion Furnace, 8"
- Process: H2 Anneal
- System Layout: Main, Utility
- System Type: L Type
- No Side Maintenance
- System Paint Color: Ivory
- Furnace Front Surface Finish: Painted
- Rapid Cooling Unit: Not Installed
- N2 Load Lock: Not Installed
- O2 Analyzer: Not Installed
- Cassette I/O Type: SMIF
- SMIF: Asyst / Indexer 2200
- AVG Compatibility: Unable
- System Main Controller: CX 3002 A
- Mechanical Controller: CX 1215-1, 1215-2
- Sequence Controller: CX 1312
- Gas Controller: CX 3201 B
- Gs Flow Chart Panel: Installed (Front)
- Operational Panel: Installed (Front)
- Signal Tower/ colors: Not Installed
- Furnace Temperature Controller: CQ 1600
- Furnace Over-temp Detector: DN 150
- Gas Detector: Riken Keiki GD-V 11 D
- Detecting Gas: H2
- Host Communications: Yes
- User Host Computer I/F: HSMS
- Manual (Drawing, Parts List, etc.): Not Included
Gas System:
- Process Gas: N2, H2
- Basic Style: Integrated Gas System (Fujikin)
- Manual Valve: Fujikin
- Air Operated Valve: Fujikin
- Filter: Pall
- Regulator: Tanaka Engineering
- MFC: Area / FC 786, FC 866
- PT Sensor: Nagano Keiki / GC 84, GC 94
- Check Valve: Installed
- Baking system: Not Installed
- Liquid Source Auto-Refill: Not Installed
- Burn Controller: Not installed
- Vaporizer: Not Installed
Vacuum / Exhaust System:
- Pump: Not Installed
- Pressure Control Valve: Not installed
- Pressure Controller: Not Installed
- Pressure Sensor: Not Installed
- Trap: Not Installed
- Gas Cooler: Not installed
Wafer / Cassette Handling:
- Auto Wafer Aligner: Not Installed
- Wafer Qty in Cassette: 26
- Cassette Storage Qty: 24
- Fork Type: 1 + 4 (VAC)
- Fork-Wafer Presence Sensor: Installed
- Fork-Variable Pitch: Installed
- Magnetic Seal Rotation: Not installed
1997 Vintage

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