AJA ATC 2036 E Evaporator
- 15-20” adjustable length from source to wafer
- Temescal Multu-Pocket Rotary E-Beam Source
- Vacuum Gauge Package with Cables
- Quartz Crystal Deposition Controller
- Water Cooled Substrate Holder
- Pressure Control/ Vacuum Valves
- Load-Lock
- Power Distribution / Pump Control
- Pneumatic Controls
Main Deposition Chamber:
- Nominal 36" high x 20" depth x 20" wide
- Flat front
- S/S vacuum chamber
- Chamber Front: Double hinged door with locking mechanism
Ports on Chamber Body for Following Components:
- Substrate holder (12' CF)
- (2) 6" CF viewpoint with integrated shutters and minor for crucible viewing & load-lock transfer
- Cryo pump / Isolation valve (10" CF)
- Vacuum gaugue (2.75")
- Load-lock (10" CF)
- Vent Valve (2.75" CF)
- (1) 6 pocket 25cc rotary e-beam source on chamber bottom
- (4-6) spare ports (additional ports available at an extra charge depending on size and orientation)
The Chamber is Mounted to an L Shaped Steel Frame With:
- 2 sets of removable chamber liners
- Integrated instrument rack
- Chamber Light
- includes atmospheric camera mounted on viewport with display for viewing crucible melt
- Heavy duty casters
- Leveling Feet
- Water Manifold with flow sensor
- All unoccupied ports are blanked off
Vacuum Pumping Consisting Of:
- Brooks Cryo-Torr 8 straight cryo-pump with compressor (Model: 8200, water cooled)
- Temperature sensor, all lines & cables
- 16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure protection
- AJA automated pumping system controlled and displayed via Touch Screen Controller for single push button pump down, cryo regeneration, and chamber vent
- Spare: 16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure
protection