{"product_id":"134100","title":"Lam \/ Novellus Concept Three Vector Express","description":"Lam \/ Novellus Concept Three Vector Express , 12\"\u003cbr\u003e- Software Version and Build: V 6.07 \/ B 97\u003cbr\u003e- Label Kit: English\u003cbr\u003e- Interconnect Cable Length: 100 feet\u003cbr\u003e- Non-Standard System Features: NSR 504691, NSR505199\u003cbr\u003eProcess Module Options\u003cbr\u003e- Primary Process: ARC\u003cbr\u003e- Secondary Process: SION\u003cbr\u003eLiquid Delivery System\u003cbr\u003e- No ILDS Options\u003cbr\u003e- RPC Generator: Astron EX\u003cbr\u003e- RF Configuration: SIRF\u003cbr\u003e- Heated Top Plate\u003cbr\u003e- Preheat\u003cbr\u003e- Top Plate Tubing Size: 1\/4 in\u003cbr\u003e- Chamber Hardware: Nickel Plated Standard\u003cbr\u003e- Chamber Gate Valve: Chemraz\u003cbr\u003e- No Hot Chamber Covers\u003cbr\u003e- HF Generator: Apex 5KW\u003cbr\u003e- LF Generator: PDX 2500\u003cbr\u003e- RF Sensor Board: Standard\u003cbr\u003e- IREPD Controller: MKS 20704 A 28818, RMU\u003cbr\u003e- O-Rings: Chemraz\u003cbr\u003e- Process Manometer: Standard\u003cbr\u003e- Hastings Gauge PM\u003cbr\u003e- Hastings Gauge Foreline\u003cbr\u003e- View Ports: 4 Viewports\u003cbr\u003e- Servo Spindle\u003cbr\u003e- Pedestal Options: Classic Conditioned 300 mm\u003cbr\u003e- Minimum Contact Area (MCA): Pin and Ball\u003cbr\u003e- Standard Carrier Ring\u003cbr\u003e- Showerhead: Standard\u003cbr\u003e- Rapid Pin Kit\u003cbr\u003e- Rapid Pin Ready\u003cbr\u003eGas Box Options\u003cbr\u003e- Exhausted Gas Box Disconnects: Yes (Req'd if N2\/CO2 \u0026gt; 15SLM)\u003cbr\u003e- Gas Box Interlock: H2 on Channel 3\u003cbr\u003e- Non-Standard Gas Box Features: NSR 505227\u003cbr\u003eFront End Options\u003cbr\u003e- UI Options: Ballroom\u003cbr\u003e- UI Location: Left\u003cbr\u003e- 4 Color Light Tower\u003cbr\u003e- Front Signal Tower Mount: Buzzer Arm Mount\u003cbr\u003e- Facia Color: Sky White\u003cbr\u003e- Facilities Config: Bottom\u003cbr\u003e- ATM Robot: Brooks\u003cbr\u003e- End Effector: Friction\u003cbr\u003e- FOUP Count: 3 FOUP\u003cbr\u003e- Load Port Type: Brooks\u003cbr\u003e- RFID Reader: Brooks\u003cbr\u003e- Mini Environment Lamp Color: Yellow\u003cbr\u003e- No Ionizer Kit\u003cbr\u003e- Light Curtain Option: Standard (Takex)\u003cbr\u003e- Additional Front End EMO\u003cbr\u003e- Load Lock: Standard\u003cbr\u003e- No IMM Readiness\u003cbr\u003e- FFU Options: Standard\u003cbr\u003e- Chase Computer OS: Windows 2000\u003cbr\u003e- Chase Computer with Cart\u003cbr\u003e- Chase Computer Cable Length: 50 Feet\u003cbr\u003e- Load Lock Pump: Kashiyama NV 60\u003cbr\u003e- Non-Standard Front End Feature: NSR 505846\u003cbr\u003eSoftware \/ Hardware:\u003cbr\u003e- QNX Factory Automation\u003cbr\u003e2010 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45121312063678,"sku":"134100","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/134100","provider":"Bridge Tronic Global","version":"1.0","type":"link"}