{"product_id":"133858","title":"Aixtron 2600 G 3 HT IC MOCVD Reactor (Metal Organic Chemical Vapor Deposition)","description":"Aixtron 2600 G 3 HT IC MOCVD Reactor (Metal Organic Chemical Vapor Deposition)\u003cbr\u003e- Software Version; AIXACT 7.4.1.9\u003cbr\u003e- PLC: 3.12.1\u003cbr\u003e- SLC\u003cbr\u003e- Process: InGaN MOCVD Epitaxy\u003cbr\u003e- Wafer: 6 x 6\"\u003cbr\u003e- Metal organic Sources: TMIn x 3, TMGa x 2, TMAl x 1, CP2Mg x 1, Future x 3\u003cbr\u003e- Hydride Sources: NH3 x 3, 100 ppm SiH4 in AR x 2, Future x 2\u003cbr\u003e- Concentration Monitors: Epison4 x 3 for TMln, Epison 4 x 1 for TMAl\u003cbr\u003e- Chiller Baths (6 available for MO Sources)\u003cbr\u003e- Purifiers: Entegris Getters for NH3, H2 \u0026amp; N2\u003cbr\u003e- Filters\u003cbr\u003e- Heating System: RF Coil with Trumpf Huttinger RF Generator BIG 120\/50\u003cbr\u003e- Glove Box: MBraun Nitrogen Glovebox with Controller\u003cbr\u003e- Custom Built Exhaust System\u003cbr\u003e- Process Pump: Ebara ESA 70 W or ESA 80 W\u003cbr\u003e- DOR \u0026amp; Glove Box Pumps: Adixen ACP-15(G) x 2\u003cbr\u003e- Abatement: Unisem UN2000A-WHG (single or shared across 2 reactors)\u003cbr\u003e- Reactor Chillers: Tek-Temp Recirculating Closed Lop Chiller\u003cbr\u003e- Ceiling Temperature Control, Custom Built Automatic Ceiling Loader\u003cbr\u003e- In-Situ Pyrometry (available)\u003cbr\u003e- Gas Foil Rotation (GFR): Individual GFR Control for Each Puck\u003cbr\u003e- Spare Channels: 23 Spare MFC Channels \u0026amp; 10 Spare Valve output Channels\u003cbr\u003e- Spare Parts (potentially some available)\u003cbr\u003e2007 to 2009 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45111613587646,"sku":"133858","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_13589ddb-0536-429d-94be-642f43a5b1ad.jpg?v=1748367156","url":"https:\/\/www.bridgetronic.com\/products\/133858","provider":"Bridge Tronic Global","version":"1.0","type":"link"}