{"product_id":"133855","title":"Aixtron 2600 G 3 HT MOCVD Reactor (Metal Organic Chemical Vapor Deposition)","description":"Aixtron 2600 G 3 HT MOCVD Reactor (Metal Organic Chemical Vapor Deposition), 3\"\u003cbr\u003e- Software: CACE 3.5.0284\u003cbr\u003e- PLC: 3.7\u003cbr\u003e- SLC: 2.01\u003cbr\u003e- Process: InGaN MOCVD Epitaxy\u003cbr\u003e- Wafer: 11 x 3\"\u003cbr\u003e- Metal Organic Sources: TMin x 3, TMGa x 2, TEGa x 2, TMAI x 1, Cp2Mg x 1\u003cbr\u003e- Hydride Sources: NH3 x 2, 100 ppm SiH4 in Ar x 1\u003cbr\u003e- Concentration Monitors: Epison 4 x 3 for TMin\u003cbr\u003e- Chiller Baths (7 available for MO Sources)\u003cbr\u003e- Purifiers: Nanochem for NH3, SAES Monotorr for N2\u003cbr\u003e- Filters\u003cbr\u003e- Heating System: RF Coil with Trumpf Huttinger RF Generator BIG 120\/150\u003cbr\u003e- Glove Box: MBraun Nitrogen Glovebox with Controller\u003cbr\u003e- Exhaust System: Custom Built Exhaust System\u003cbr\u003e- Process Pump: Ebara ESA 70 W or ESA 80 W\u003cbr\u003e- DOR \u0026amp; Glove BoxPumps: Adixen ACP 15G x 2\u003cbr\u003e- Abatement\u003cbr\u003e- Reactor Chiller: Tek-Temp Recirculating Closed loop Chiller\u003cbr\u003e- Quartz Ceiling with Temperature Control\u003cbr\u003e- In-Situ Pyrometry: Laytec Pyro 400 with EpiNET 2.2 for Feedback Temperature Control\u003cbr\u003e- Gas Foil Rotation (GFR): Individual GFR Control for Each Puck\u003cbr\u003e- Spare Channels\u003cbr\u003e- Spare Parts (potentially some available)\u003cbr\u003e2004 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45111530586302,"sku":"133855","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_be675c1b-d99a-4873-80d7-234ee7e2fce3.jpg?v=1748366489","url":"https:\/\/www.bridgetronic.com\/products\/133855","provider":"Bridge Tronic Global","version":"1.0","type":"link"}