KLA P 22 H Surface Profilometer
- Step Height Precision Micro 2D Scanner
- Dual View Optics
- Motorized precision 200mm Diameter X-Y vacuum sample stage
- Stylus, 2 um Radius 60
- Window based Operation system,
- Clean room Operation Manual
- LCD Monitor
General Performance
- Scan Length: 60 mm
- Scan Speed: 1 um/sec to 25mm/ sec
- Scan Method: Bi-directional moving stylus
- Sampling Rate: 5, 10, 20, 50, 100, 200, 500 , 1000 Hz
- Vertical Range / Resolution:
+,- 13um/0.0075A
+,-65um/0.04A
327um/0.19A
- Stylus Force: Adjustable between 0.05 ~ 50mg
Step Height Repeatability, 1: 0.75 nm or 0.1%:Sample Handling:
- 200mm diameter stage moving
- Theta : 360
- 21 mm, maximum sample thickness
- 1 Kg , maximum sample weight
- Automated Wafer Handler
- 1 open loadwe for 200mm and 150mm
Automated 2D leveling algorithms
Data Analysis / Output:
- Data Screen : display scan, roughness, data summary table listing up to 27 parameters ( total 48 )
- Automatic Cursor Positioning :
- Database Manager : Save & Retrieve data
- ASCII Output : Scan data is exportable to commercial spreadsheet programs
- Windows 3.1
1997 Vintage