Applied Materials Mirra Mesa CMP (Chemical Mechanical Polisher), 8"
- Pentium Board
- Raid Hard Disc System: Dual hard Disk
- USB Port: Data Copy System
- Mirra Cattrack: Waterfall System
- UPA System: UPA Moving to Top of Mirra Cattrack (Configured as Contour Head)
- Slurry Delivery System: Close Loop Delivery System for all 3 Platens
- Pad Conditioner Arm: With Up/Down, Rotation & Collision Sensor for all Pad Arms
- Brush Torque System: Brush 1 & 2 with Brush Torque Monitoring System
- Euro-Pneutronic Ass: Pneumatic Controller Assembly 0.1 MPa, 20 (0010-34093)
- Head Leak Test System
- HCLU Cup: Conventional or C3 Loadup
- HCLU DIW Flow Meter: HCLU DIW Flow Rate Control and Flow Sensor
- Megasonic Temperature Sensor: Close Loop Megasonic Module Temperature Defection System
- SRD Temperature Sensor: SRD Heater Temperature Detection System
- End Point System: Laser (Full Scan) and Motor Torque EPD
- Contour Ehad Polishing Heads: Optiion as Titan 1
- High Pressure Rinse (HPR) System: Spray Bar
- High Pressure Rinse (HPR) System FLow System; Able to Trigger Tool Alarm when HPR Low/High Flow
- Slurry Arm:High Flow
- Brush Mode: Motorized Bridh with Built in Rotation Alarm Detection
Fault Detection Control:
- Able to Collect Tool Data Such as Pressure, Rotation, Temperature, Megasonic, & Power Slurry Flow
Mesa Chemical Closed Loop Supply:
- Mesa Chemical Flow with Close Loop Flow Rate Monitoring System
- Able to Trigger Alarm if Low/High Flow for Megasonic, Brush 1 & 2, and SSRD
WAIS - Defect Monitoring System will be Installed
NSK Motor & Driver - Will use Replacement Model: DolDol 200 Motor