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Lam / Novellus / Gasonics Vector Extreme PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 132921

Make: Lam / Novellus / Gasonics

Model: Vector Extreme

Wafer Sizes: 12 inch

Last Confirm Date: May 01, 2025

Lam / Novellus / Gasonics Vector Extreme PECVD (Plasma-Enhanced Chemical Vapor Deposition), 12"
- Software Version and Build : V5.2
- Label Kit: English
- Interconnect Cable Length: 75 Feet
Process Module Options
- Primary Process: SION
- Secondary Process: ARC, USG
Liquid Delivery System
- RPC Generator : AX 7645
- RF Configuration: SIRF
- Heated Top Plate
- Top Plate Tubing Size: 1/4 in
- Chamber Hardware: Nickel Plated Standard
- Chamber Gate Valve: Chemraz
- Hot Chamber Covers
- HF Generator: Apex 3KW
- LF Generator: PDX 2500
- RF Sensor Board: Standard
- IREPD Controller: MKS 20704A 28818, RMU
- O-Rings: Chemraz
- Process Manometer: Heated
- Hastings Gauge PM
- Hastings Gauge Foreline
- View Ports: 5
- Servo Spindle
- Pedestal Options: Classic Conditioned 300mm
- Minimum Contact Area (MCA): Pin and Ball
- Carrier Ring: Standard
- Showerhead: Standard
- Rapid Pin Kit
- Rapid Pin Ready
Gas Box Options
- Exhausted Gas Box Disconnects
- Gas Box Interlock: H2 on Channel 3
- Gas Box Configuration: STD 13 Ch GB
- Non-Standard Gas Box Features: NSR 1
Front End Options
- UI Options: Ballroom
- UI Location: Left
- Signal Tower Options: 4 Color Light Tower
- Front Signal Tower Mount: Buzzer Arm Mount
- Facia Color: Sky White
- Facilities Configuration: Bottom
- ATM Robot: Brooks
- End Effector: Friction
- FOUP Count: 4
- Load Port Type: Vision Brooks
- RFID Reader: Omron
- Mini Environment Lamp Color: Yellow
- Light Curtain Option: Standard
- Additional Front End EMO
- FFU Options: 2 Piece
- Chase Computer OS: Windows XP
- Chase Computer with Cart: 1
- Chase Computer Cable Length: 50 Feet
- Load Lock Pump: Kashiyama NV60
- Software / Hardware: Advanced Factory Automation
2010 Vintage

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