{"product_id":"132918","title":"Lam \/ Novellus Concept Three Vector Express","description":"Lam \/ Novellus Concept Three Vector Express , 12\"\u003cbr\u003e- Primary Process: SION\u003cbr\u003e- Secondary Process: PEO\u003cbr\u003e- RPC Generator: Astron EX\u003cbr\u003e- RF Configuration: SIRF\u003cbr\u003e- Heated Top Plate\u003cbr\u003e- Preheat\u003cbr\u003e- Top Plate Tubing Size: 1\/4\"\u003cbr\u003e- Chamber Hardware: Nickel Plated Standard\u003cbr\u003e- Chamber Gate Valve: Chemraz\u003cbr\u003e- HF Generator: Apex 3KW\u003cbr\u003e- LF Generator: PDX 2500\u003cbr\u003e- RF Sensor Board: Standard\u003cbr\u003e- IREPD Controller: MKS 20704A-28818, RMU\u003cbr\u003e- O-Rings: Chemraz\u003cbr\u003e- Process Manometer: Standard\u003cbr\u003e- View Ports: 4\u003cbr\u003e- Servo Spindle\u003cbr\u003e- Pedestal Options: Classic Conditioned 300mm\u003cbr\u003e- Minimum Contact Area (MCA): Pin and Ball\u003cbr\u003e- Carrier Ring: Standard Carrier Ring\u003cbr\u003e- Showerhead: Standard\u003cbr\u003e- Rapid Pin Kit\u003cbr\u003e- Rapid Pin Ready\u003cbr\u003eGas Box Options\u003cbr\u003e- Exhausted Gas Box Disconnects\u003cbr\u003e- Gas Box Interlock: H2 on Channel 3\u003cbr\u003e- Gas Box Configuration: STD 13 Ch GB\u003cbr\u003e- Non-Standard Gas Box Features\u003cbr\u003eFront End Options\u003cbr\u003e- UI Options: Ballroom\u003cbr\u003e- UI Location: Left\u003cbr\u003e- Signal Tower Options: 4 Color Light Tower\u003cbr\u003e- Front Signal Tower Mount: Buzzer Arm Mount\u003cbr\u003e- Facia Color: Sky White\u003cbr\u003e- Facilities Configuration: Bottom\u003cbr\u003e- ATM Robot: Brooks\u003cbr\u003e- End Effector: Friction\u003cbr\u003e- FOUP Count: 2 FOUP\u003cbr\u003e- Load Port Type: Brooks\u003cbr\u003e- RFID Reader: Brooks\u003cbr\u003e- Mini Environment Lamp Color: Yellow\u003cbr\u003e- Light Curtain Option: Standard (Takex)\u003cbr\u003e- Additional Front End EMO\u003cbr\u003e- Load Lock: Standard\u003cbr\u003e- FFU Options: Standard\u003cbr\u003e- Chase Computer OS: Windows 2000\u003cbr\u003e- Chase Computer with Cart: 1\u003cbr\u003e- Chase Computer Cable Length: 50 Feet\u003cbr\u003e- Load Lock Pump: Kashiyama NV60\u003cbr\u003e- Non-Standard Front End Feature\u003cbr\u003e- Software \/ Hardware: Factory Automation\u003cbr\u003e2010 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45057601831102,"sku":"132918","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_ea28e596-18e3-4278-9bbe-69a9dc952281.jpg?v=1746135648","url":"https:\/\/www.bridgetronic.com\/products\/132918","provider":"Bridge Tronic Global","version":"1.0","type":"link"}