KLA Surfscan SP 2 Particle Defect System, 12"
- < 37nm defect sensitivity on polished bare silicon
- Enables qualification of current and next-generation substrates SOI, strained SOI and strained Si
- Qualification and monitoring of process tools, at the 90, 65 and45 nm technology nodes
Includes the following components:
- UV laser
- Oefect map and histogram with zoom
- iMicroView measurement capability
- suRFimage
- Real-Time Defect Classification (RTDC)
- Microsoft Windows XP Operating System
Inspection modes:
- Standard Throughput Inspection Mode
- High Sensitivity Inspection Mode
Advanced Illumination Optics supporting the following mode(s):
- Oblique Illumination
Equipped with Powder Coat Painted Panels
Includes 300mm Phoenix Dual FIMS Vacuum Wafer Handler (PP)
- Configured for ELB (ASIA) Power Inlet
Includes the following enable licenses:
- Optical Filter
- Enhanced XV Coordinates
- 2mm Edge Exclusion
- Standard Classification Package
- LPD-N Classification
- LPD-ES Classification
- Grading and Sorting
- Haze
- Haze Analysis and Normalization
- Haze line Classification
- 1DM
Configured for IC/OEM Mfg Surf Quality Recipe
Std Throughput Inspect mode
- 20 Degree
- 40 Degree
- Rough Films
NGS Desktop Software Package
- 4 Color Light Tower (RYGB)
- Ion Shower for Phoenix Dual 12" PSL 0.04µm (40nm)
- 12" PSL 0.06µm (60nm)
- 12" PSL 0.083µm (83nm)
- 12" PSL 0.102µm (102nm)
- 12" PSL 0.lSSµm (155nm)
- 300mm XY calibration Wafer
- Dryer for COE
2011 Vintage