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Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter
Axcelis VHE Implanter

Axcelis VHE Implanter

Asset #: 131633

Make: Axcelis

Model: VHE

Wafer Sizes: 6 inch

Axcelis VHE Implanter, 6"
- 8" wafer convertible
- Full disk 17 wafers
- Wafer tilt
- Source: Bernas
- Extraction system: Triple axes
- Gases: Boron, Phosfine
- SDS Gas Box
- Max Implantation Energy: 5000 KeV
- Max Extraction Boltage: 90 KeV
- Heat Exchanger
- Orienter: Flat
- Load and Unload Locks
- Source Extraction Alignment Jig
- AMU
- Beamline Column
- Mechanical Clamp
- PFS HD
2001 Vintage

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