{"product_id":"131630","title":"Hitachi HS 9050 Asher","description":"Hitachi HS 9050 Asher, 12\"\u003cbr\u003e- Multi-chamber\u003cbr\u003e- HDD removed\u003cbr\u003e- No software\/ hard drives \u003cbr\u003e- Copper \u003cbr\u003eMini-Environment Wafer Loading Module (EFEM)\u003cbr\u003e- 3 ea 25-wafer FOUP-Capable Load Ports \/W N2 purge\u003cbr\u003e- Fan Filter Unit\u003cbr\u003e- Four Axis Robot\u003cbr\u003e- Centering Unit: V-notch alignment and centering\u003cbr\u003eMan\/Machine Interface Main Console\u003cbr\u003e- Personal Computer (GUI PC)\u003cbr\u003e- LCD Display\u003cbr\u003e- Keyboard\u003cbr\u003e- Pointing Device\u003cbr\u003eLock Room\u003cbr\u003eTransfer Room\u003cbr\u003e- Dual-Arm High Speed Vacuum Robot Assembly\u003cbr\u003eExtended Module\u003cbr\u003e- Buffer Room\u003cbr\u003e- Transfer Room\u003cbr\u003e- Dual-Arm High Speed Vacuum Robot Assembly\u003cbr\u003e- Part number of pads for Vacuum Robot\u003cbr\u003eProcess Modules\u003cbr\u003e- 7 chamber tool = Five (5) Ashing Units\u003cbr\u003e- HS-9050 Ashing Unit Items\u003cbr\u003e- Lambda Source Unit\u003cbr\u003e- Capacitance Manometer (722B11TCD2FA) DG1\u003cbr\u003e- RF Power Supply(AXG-5000Ⅲ-27M-KE)\u003cbr\u003e- Multi-wavelength EPD 0.1s sampling (Spectrometer)\u003cbr\u003e- MFC Configuration for Ashing Unit\u003cbr\u003e- MFC#N N2  Max Flow 20 L\/min\u003cbr\u003e- MFC#1 (*) O2  Max Flow 20 L\/min\u003cbr\u003e- MFC#2 Ar  Max Flow 20 L\/min\u003cbr\u003e- MFC#3 H2  Max Flow 5 L\/min\u003cbr\u003e- MFC#4 N2  Max Flow 20 L\/min\u003cbr\u003e- MFC#5 (*) CF4  Max Flow 1 L\/min\u003cbr\u003e- MFC#6 (**) CO2 Max Flow 0.4 L\/min\u003cbr\u003e- MFC#7 He  Max Flow 20 L\/min\u003cbr\u003e- MFC#8: Without gasline, without MFC\u003cbr\u003e- MFC#9: Without gasline, without MFC\u003cbr\u003e- MFC#10: Without gasline, without MFC\u003cbr\u003e Process Modules - Two (2) Cooling Units","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45002112794814,"sku":"131630","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/4_3373ca90-062b-459b-b44f-f398f2651f33.jpg?v=1764955245","url":"https:\/\/www.bridgetronic.com\/products\/131630","provider":"Bridge Tronic Global","version":"1.0","type":"link"}