{"product_id":"131506","title":"Okamoto SPP 800 ATB Polisher","description":"Okamoto SPP 800 ATB Polisher, 4\", 6\"\u003cbr\u003e- Fully Automatic\u003cbr\u003eLoading unit\u003cbr\u003e- 4 x Cassette port with dry in\u003cbr\u003e- Wafer handling robot\u003cbr\u003e- Stand-by stage, 4inch x 8 wafers, 6 inch x 4 wafers\u003cbr\u003e- Vacuum chuck cleaning unit\u003cbr\u003ePolish head \u003cbr\u003e- 120 Degree index\u003cbr\u003e- Driver and Hold module\u003cbr\u003e- Pressure unit\u003cbr\u003e- Maximum weight : 900kgs (Include chuck weight)\u003cbr\u003e- Clump method : vacuum\u003cbr\u003e- Rotation speed : 5-100 RPM\u003cbr\u003ePolish unit\u003cbr\u003e- Table size 820mm x 2 tables\u003cbr\u003e- Slurry separator\u003cbr\u003e- Table oscillation \u003cbr\u003eUn-Loading unit\u003cbr\u003e- 4 x Cassette port with wet out\u003cbr\u003e- Handling robot\u003cbr\u003e- Stand-by stage, 4inch x 8 wafers, 6 inch x 4 wafers\u003cbr\u003ePad conditioner\u003cbr\u003e- Brush type\u003cbr\u003eMachine cover\u003cbr\u003e- Exhaust duct\u003cbr\u003e- HEPA Filter\u003cbr\u003eSafety\u003cbr\u003e- Enclosed cover with inter locking\u003cbr\u003e- EMO Button\u003cbr\u003e- Signal tower\u003cbr\u003eOptional accessories\u003cbr\u003e- Chiller for Polish table\u003cbr\u003e- Vacuum pump unit\u003cbr\u003e- Vacuum chuck for 4 inch\u003cbr\u003e- Slurry supply unit\u003cbr\u003ePolish table\u003cbr\u003e- Number of polish table: 2\u003cbr\u003e- Diameter of polish table: φ820mm\u003cbr\u003e- RPM of polish table: 10～114rpm\u003cbr\u003e- Table Chiller unit: By water coolant\u003cbr\u003e   - 33L\/min\u003cbr\u003e   - 10～40℃\u003cbr\u003e- Oscillation range: ±25ｍｍ \u003cbr\u003e2021 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44999297695934,"sku":"131506","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/5_4f449a43-b516-44a5-8976-a227478d570c.jpg?v=1744226072","url":"https:\/\/www.bridgetronic.com\/products\/131506","provider":"Bridge Tronic Global","version":"1.0","type":"link"}