{"product_id":"130107","title":"SVG 661 HT Aligner","description":"SVG 661 HT Aligner, 6\"\u003cbr\u003e- Refurbished in 2022\u003cbr\u003e- Process: Photo Exposure\u003cbr\u003e- Heat Exchanger \/ Chiller: Blower\u003cbr\u003eSoftware: \u003cbr\u003e- OS 2000 Hardware and Software v29.x or Higher\u003cbr\u003e- SEMI-GEM E 30 \u0026amp; HSMS # 37 Compliant Host Link\u003cbr\u003eMask \/ Wafer Handling: \u003cbr\u003e- Elevator Platforms for 150 mm Wafer Fluoroware Cassettes\u003cbr\u003e- 150 mm Wafer Handling \u0026amp; processing Capability with Extended Bellows Chuck\u003cbr\u003e- Electronic Motorized Carousel Arm\u003cbr\u003e- Pellicle Protection Mask Cassette System for 7.25\" Round Masks\u003cbr\u003e- One 7.25\" Round Mask Carrier and Cassette\u003cbr\u003e- Extended Life Mask X, Wafer X, \u0026amp; Pre Aligner Anchor Flexures\u003cbr\u003eOptical:\u003cbr\u003e- High Throughput Coated Optics (HT)\u003cbr\u003e- UV4 Filter Set\u003cbr\u003e- Narrow Band Secondary (UV4)\u003cbr\u003e- Integrated Uniformity Tester\u003cbr\u003e- AUDIT (Automated Uniformity Testing)\u003cbr\u003eFocus \/ Viewing \/ Mag:\u003cbr\u003e- Air Gauge Focus System\u003cbr\u003e- Extended Life Gauge Head Flexure\u003cbr\u003e- Mini-Mag Strong Shell Positioning\u003cbr\u003e- AVM (Automated Variable Magnification) \u003cbr\u003e- Brightfield and Darkfield for AFA (Automated Fine Alignment)\u003cbr\u003e- GAS Scan Package\u003cbr\u003eEnvironmental\/Pneumatics:\u003cbr\u003e- New Easy to Use Automated Helium Management System\u003cbr\u003e- New Style High Reliability 300, 800, \u0026amp; 900 Manifolds\u003cbr\u003e- New SMC Solenoid View Stop E-Brake Ass'y\u003cbr\u003eSafety:\u003cbr\u003e- New GFO Line Voltage Refrigerator\u003cbr\u003eAll New Hoses, Anodizing, and Paint Throughout Chamber Options:\u003cbr\u003e- 1 Chamber\u003cbr\u003e- Chamber Type: M 500 \/ 600\u003cbr\u003e- Cassette Stage: 150 mm no smf\u003cbr\u003e- Wafer Mapping: Optical Sensor\u003cbr\u003eModules \u0026amp; Systems:\u003cbr\u003e- Control System: OS 2000\u003cbr\u003eAir Cooler: 39,000 BTU 220 Vac 3 Ф","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44929322057918,"sku":"130107","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_bf7d4f78-8229-46c3-8f1c-4b845631d12f.jpg?v=1741972116","url":"https:\/\/www.bridgetronic.com\/products\/130107","provider":"Bridge Tronic Global","version":"1.0","type":"link"}