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Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400
Applied Materials Mirra 3400

Applied Materials Mirra 3400

Asset #: 129553

Make: Applied Materials

Model: Mirra 3400

Wafer Sizes: 6, 8 inch

Applied Materials Mirra 3400 , 6", 8"
- Cassette Que: 4 Wet
- Handling: Wet In / Wet Out
- Platens: 3
- Polish Heads: 4
- Slurry Delivery: Rotary pump (6)
- Slurry Configuration: AB, AB w/ Position Sensor
- Slurry Delivery Arm Type: Extended w/ 4 Outputs
- ISRM P 1: iScan / Full Scan/M. Torque
- ISRM P 2: Full Scan/M. Torque
- ISRM P 3: Full Scan/M. Torque
- UPA: IT / RR / MEM
- UPA Supply: Nitrogen Gas
- Head Types: Titan I
- Pad Conditioner: DDF 3
- Min / Max Platen Speed: 0 -125 rpm
- Min / Max Slurry Flow: 15 - 400 ml/mn
- Min / Max Head pressure: 0.7 - 14 psi
- Min / Max PC Downforce: 3.0 - 17 lbf
- Endpoint Software: IB 11 J 1
- Polisher Software: mp 2 B 6.2_36
- Hard Drive Configuration: XP / 68 Pin SCSI
With:
- Heads: 150 mm (4), 200 mm (4)
- HCLU: 150 mm Conversion Kit, 200 mm Conversion Kit
- Loading Tank Track: 150 & 200 mm 4 Position Cassette Holders
-Teflon Cassettes: 150 mm Teflon Cassettes (2), 200 mm Teflon Cassettes (2)
Modifications:
- Balanceworx Remote Cascade Upgrade (relocation of the polishing head pneumatic controls oof the spindle to top of tool)
- Balanceworx Sigma 7 Series NSK Head Motor & Drivers
2001 Vintage

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