{"product_id":"129126","title":"Solitec 5110 C Photoresist Spin Coater","description":"Solitec 5110 C Photoresist Spin Coater, 3\" to 9\"\u003cbr\u003e- Control Panel has 5 potentiometers for speed setting with individual 0-99.9s timers\u003cbr\u003e- OEM Operational Manuals and drawings \u003cbr\u003e- 3\" Vacuum Chuck \u003cbr\u003e- Wafer Handling: Manual with loading paddle to center wafer\u003cbr\u003e- Solvent Dispense: Pressurized tank required\u003cbr\u003e- Substrate Sizes (Max): 9\" Round, 6\" square, 9\" diagonal rectangular\u003cbr\u003e- Tachometer: Digital readout from optical encoder, 10 rmp resolution\u003cbr\u003e- Acceleration: Variable from 1,000 to 40,000 rpm\/sec\u003cbr\u003e- Process Control: Digital timers with manual programming, relay logic\u003cbr\u003e- Time: Variable from 1 to 999 sec in 1 sec increments\u003cbr\u003eResist Dispense: \u003cbr\u003e- Automatic Teflon diaphragm pump \u003cbr\u003e- With precise dispense adjustment: 0.5 to 38 mlt 1%, viscosity 4 to 10,000 centistokes\u003cbr\u003e- Separate drawback adjustment\u003cbr\u003eSpeed Control:\u003cbr\u003e- Closed loop servo with t10 rpm speed control\u003cbr\u003e- Adjustable from 200 to 10,000 rpm\u003cbr\u003e- Digital reference on spin and spread speeds\u003cbr\u003eStandard Process Sequence:\u003cbr\u003e- Resist coat (static or dynamic)\u003cbr\u003e- Spread\u003cbr\u003e- Spin\u003cbr\u003eSystem Control Panel: \u003cbr\u003e- Digital Tachometer\u003cbr\u003e- Power ON\/OFF\u003cbr\u003e-  Vacuum ON\/OFF\u003cbr\u003e- Start\u003cbr\u003e-  Emergency Stop\u003cbr\u003e- Motor Purge Interlock\u003cbr\u003e- Vacuum Interlock\u003cbr\u003e- Resist Select\u003cbr\u003e- Dispense AUTO\/OFF\u003cbr\u003e- Spindle Acceleration\u003cbr\u003e- Solvent (optional)\u003cbr\u003e- Nitrogen (optional)\u003cbr\u003e- Resist Dispense\u003cbr\u003e- Spread\u003cbr\u003e- Spin\u003cbr\u003e- Cycle Select\u003cbr\u003e- Spindle Speed\u003cbr\u003e- Digital Timers\u003cbr\u003eFeatures:\u003cbr\u003e- Single chuck for wafers, masks or substrates\u003cbr\u003e- Solitec proprietary diaphragm type dispense pump\u003cbr\u003e- 100A, 3 sigma, full radius uniformity across a wafer\u003cbr\u003e- Selectable process functions\u003cbr\u003e- Downflow exhaust system for backsplash control\u003cbr\u003e- N2 motor purge and interlock\u003cbr\u003e- Vacuum interlock on wafer chuck\u003cbr\u003e- Optional auto solvent dispense for HMDS\u003cbr\u003e- 5 gallon drain bucket with exhaust\u003cbr\u003e- Closed loop servo speed control for tight process control\u003cbr\u003e- 1,000 to 40,000 rpm\/sec acceleration\u003cbr\u003e- High uptime, easy maintenance design\u003cbr\u003e- Polypropelene waste container\u003cbr\u003e- Digital tachometer with direct optical encoder\u003cbr\u003e- t 10 rpm spin speed control\u003cbr\u003e- Solvent dispense before coating (optional)\u003cbr\u003e- N2 blow-off (optional)\u003cbr\u003e- One wafer chuck and loading paddle included\u003cbr\u003eApplications:\u003cbr\u003e- Positive resist coatings on wafers, masks and substrates\u003cbr\u003e- Negative resist coating on wafers, masks and substrates\u003cbr\u003e- PMMA and E-Beam resist coating\u003cbr\u003e- Silicon, GaAs, InP and other semiconductor materials\u003cbr\u003e- Polyimide coatings on wafers, masks and substrates\u003cbr\u003e- Photosensitive polyimide coating\u003cbr\u003e- Multi-layer resists\u003cbr\u003eProcess Options:   \u003cbr\u003e- Option B - P\/N 5110C-2\u003cbr\u003e- Option A - P\/N 5110C-1 N2 Spin Solvent Dispense\u003cbr\u003e- Resist dispense (Tank required)\u003cbr\u003e- Spread speed spin, Final high speed spin, Spin dry (No N2)\u003cbr\u003e    - Resist dispense\u003cbr\u003e    - Spread speed spin\u003cbr\u003e    - Final high speed spin\u003cbr\u003e- Option C - P\/N 5110C-3\u003cbr\u003e- Solvent dispense (tank required) N2 Spin\u003cbr\u003e- Resist dispense\u003cbr\u003e- Spread speed spin Final high speed spin\u003cbr\u003eEquipment Options:\u003cbr\u003e- Extra Resist Pumps:  P\/N 0967\u003cbr\u003e- 3 gallon stainless steel tanks with metal sheathed teflon supply lines for solvents:\u003cbr\u003e     - P\/N 0066 For HMDS, and Xylene with Viton seals\u003cbr\u003e     - P\/N 0070 For N-Butyl Acetate, Acetone, EGMEA and Alcohols with EPR seals\u003cbr\u003e     - See page 67 for chemical compatability table\u003cbr\u003e- Extra loading Paddle\u003cbr\u003e- Spares Kit  P\/N 001525\u003cbr\u003e- Pre-pump filter for positive or negative resist  P\/N 0255\u003cbr\u003e- Additional vacuum chucks \u003cbr\u003e- Small volume, disposable cartridge dispense system for multiple dispense applications\u003cbr\u003e1998 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44876480676030,"sku":"129126","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/13_10af3e19-2dfd-418e-871f-cff65108a36b.jpg?v=1740171370","url":"https:\/\/www.bridgetronic.com\/products\/129126","provider":"Bridge Tronic Global","version":"1.0","type":"link"}