KLA Surfscan SP 2 Particle Defect System, 12"
- HDD and Software Included
- 4 Color Light Tower (RYGB)
- Ion Shower for Phoenix Dual
12" PSL 0.04 µm (40nm)
12" PSL 0.06 µm (60nm)
12" PSL 0.083 µm (83nm)
12" PSL 0.102 µm (102nm)
12" PSL 0.155 µm (155nm)
- 300 mm XY Calibration Wafer
- Dryer for COE
- Optimized sensitivity and throughput - < 37 nm defect sensitivity on polished bare silicon
- Enables qualification of current and next-generation substrates, SOI, strained SOI and strained Si
- Qualification and monitoring of process tools, at the 90, 65 and 45 nm technology nodes
Assists in process troubleshooting and development Includes the following components:
- UV laser
- Defect map and histogram with zoom
- iMicroView measurement capability
- SURFimage
- Real-Time Defect Classification (RTDC)
- Microsoft Windows XP Operating System
Features the following inspection modes:
- Standard Throughput Inspection Mode
- High Sensitivity Inspection Mode
Advanced Illumination Optics supporting the following mode(s):
- Oblique Illumination
- IDM
- High Sensitivity Inspect Mode
- Std Throughput Inspect mode
- 20 Degree
- 40 Degree
- Equipped with Powder Coat Painted Panels Includes 300mm Phoenix Dual FIMS Vacuum Wafer Handler (PP)
Ballroom Configuration (Standard) Configured for ELB (ASIA) Power Inlet Includes the following enable licenses:
- Optical Filter
- Enhanced XY Coordinates
- 2 mm Edge Exclusion
- Standard Classification Package
- LPD-N Classification
- LPD-ES Classification
- Grading and Sorting
- Haze
- Haze Analysis and Normalization
- Haze Line Classification
- Rough Films
- NGS Desktop Software Package
- Host ID will be required during software installation
2011 Vintage