{"product_id":"128750","title":"KLA Surfscan SP 2 Particle Defect System","description":"KLA Surfscan SP 2 Particle Defect System, 12\"\u003cbr\u003e- HDD and Software Included\u003cbr\u003e- 4 Color Light Tower (RYGB)\u003cbr\u003e- Ion Shower for Phoenix Dual\u003cbr\u003e12\" PSL 0.04 µm (40nm)\u003cbr\u003e12\" PSL 0.06 µm (60nm)\u003cbr\u003e12\" PSL 0.083 µm (83nm)\u003cbr\u003e12\" PSL 0.102 µm (102nm)\u003cbr\u003e12\" PSL 0.155 µm (155nm)\u003cbr\u003e- 300 mm XY Calibration Wafer\u003cbr\u003e- Dryer for COE\u003cbr\u003e- Optimized sensitivity and throughput - \u0026lt; 37 nm defect sensitivity on polished bare silicon \u003cbr\u003e- Enables qualification of current and next-generation substrates, SOI, strained SOI and strained Si \u003cbr\u003e- Qualification and monitoring of process tools, at the 90, 65 and 45 nm technology nodes \u003cbr\u003eAssists in process troubleshooting and development Includes the following components:\u003cbr\u003e- UV laser\u003cbr\u003e- Defect map and histogram with zoom\u003cbr\u003e- iMicroView measurement capability\u003cbr\u003e- SURFimage\u003cbr\u003e- Real-Time Defect Classification (RTDC)\u003cbr\u003e- Microsoft Windows XP Operating System\u003cbr\u003e  Features the following inspection modes:\u003cbr\u003e- Standard Throughput Inspection Mode\u003cbr\u003e- High Sensitivity Inspection Mode\u003cbr\u003eAdvanced Illumination Optics supporting the following mode(s):\u003cbr\u003e- Oblique Illumination\u003cbr\u003e- IDM\u003cbr\u003e - High Sensitivity Inspect Mode\u003cbr\u003e- Std Throughput Inspect mode\u003cbr\u003e- 20 Degree\u003cbr\u003e- 40 Degree\u003cbr\u003e - Equipped with Powder Coat Painted Panels Includes 300mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) \u003cbr\u003eBallroom Configuration (Standard) Configured for ELB (ASIA) Power Inlet Includes the following enable licenses:\u003cbr\u003e- Optical Filter\u003cbr\u003e- Enhanced XY Coordinates\u003cbr\u003e- 2 mm Edge Exclusion\u003cbr\u003e- Standard Classification Package\u003cbr\u003e- LPD-N Classification\u003cbr\u003e- LPD-ES Classification\u003cbr\u003e- Grading and Sorting\u003cbr\u003e- Haze\u003cbr\u003e- Haze Analysis and Normalization\u003cbr\u003e- Haze Line Classification\u003cbr\u003e- Rough Films\u003cbr\u003e- NGS Desktop Software Package\u003cbr\u003e- Host ID will be required during software installation\u003cbr\u003e2011 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44856335892670,"sku":"128750","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2_1f871af7-2287-4fed-b71c-e37ccb4a4bfb.jpg?v=1750451605","url":"https:\/\/www.bridgetronic.com\/products\/128750","provider":"Bridge Tronic Global","version":"1.0","type":"link"}