Aixtron AIX R 6 MOCVD (Metal Organic Chemical Vapor Deposition)
- Brand new never used
- Main gas blending unit
- Ventilated gas cabinet
- Gas blending and injection lines
- Check valves
- Horiba STEC digital mass flow controllers /
pressure controllers
- Fujikin pneumatic membrane valves
- Particle filters in input lines
- Manual valves in hydride input lines
- Hydrogen and nitrogen carrier gas manifold
- Run/vent stacks (2x MO and 1x hydride) with H2/N2
- Separation for MO stack
- Hydride source supply with N2
- Purge channels for reactor, heater and optical
ports
- LOTO valves on all process and hydride gas inlets
- Line heating for Cp2 Mg and TMIn lines (from inlet
- Bubbler to inlet R/V ) (where used)
- N2/H2 Mixture unit for Run MO Stack (MO Bypass)
- Gas line bypassing the MO Run/Vent Stacks
- 1 H2/N2 switching valve
- 1 MFC
- N2/H2 Mixture for Run Hydride (lower plenum)
- Gas line bypassing the Hydride Run/Vent Stack
- 1 H2/N2 switching valve
- Differential run/vent pressure balancing for
MO-H2 Stack and MO-N2 Stack
- 2 differential pressure sensors
- 2 X-mode MFC + needle valve
- 2 PID controller
- Leak Test Port for Bubbler In- & Outlets
- Bubbler exchange with Pump-Purge Procedure
controlled via Recipe, for all installed MO
sources
Software Package
- AIXTRON Tool Orchestrator ATO
(CTC Software) - Strict user level access
- AIXACT® (PM Software) including Analyzer
software
- AIXProcess (PM-SPS Software)
- Loader Module (LM) Control Software
- AIXTractor (Statistik Tool)
- AIXSafety - Safety PLC system and safety
network
- Acronis (Imaging Software)
2019 Vintage