{"product_id":"128621","title":"Lam TCP 9400 DFM Poly Etcher","description":"Lam TCP 9400 DFM Poly Etcher, 8\"\u003cbr\u003e- 50\/60 Hz, 3 Phase, 4 Wire\u003cbr\u003e- Transport Module \/ TCP 9400 DFM-P Modules for Tungsten Silicide Etch\u003cbr\u003e- Software: A4.0-37VM\u003cbr\u003e- Brooks Automation Mag 7\u003cbr\u003e- PM2 - TCP9400DFM-P - Wsix Etch\u003cbr\u003e- PM3 - TCP9400DFM-P - Wsix Etch\u003cbr\u003e- PM4 - TCP9400DFM-P - Wsix Etch\u003cbr\u003e- ESC - Anodized Aluminum\u003cbr\u003e- Interferometer EP - PM2, PM3 \u0026amp; PM4\u003cbr\u003e- Enhanced Universal Gas box - 12 Stick\u003cbr\u003ePM2 Gas box : (10) Brooks GF125\u003cbr\u003ePM3 Gas box: \u003cbr\u003e- (8) Unit 1661 Multiflow\u003cbr\u003e- (1) - Brooks GF100\u003cbr\u003e- (1) - Horiba Z300\u003cbr\u003ePM4 Gas Box:\u003cbr\u003e- (9) - Unit 1661 Multiflow\u003cbr\u003e- (1) - Horiba Z300\u003cbr\u003eDry Pumps:\u003cbr\u003e- Busch DS80 Cobra (3)\u003cbr\u003e- Busch BB100 (2)\u003cbr\u003eChillers:\u003cbr\u003e- TCU - Edwards 40\/80 Plus (3)\u003cbr\u003e- RPM - Voltage SAG Enhanced\u003cbr\u003e2007 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":48782812250302,"sku":"128621","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_e2aee55a-853e-493f-898f-daeb59275343.jpg?v=1787610819","url":"https:\/\/www.bridgetronic.com\/products\/128621","provider":"Bridge Tronic Global","version":"1.0","type":"link"}