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SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace
SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace
SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace
SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace
SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace

SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace

Asset #: 128354

Make: SPT Microtechnologies / Aviza / SVG

Model: AVP ACE

Wafer Sizes: 8, 6 inch

Last Confirm Date: February 05, 2025

SPT Microtechnologies / Aviza / SVG AVP ACE Vertical Furnace, 6", 8"
- 3 Phase, 50/60 Hz, 208V
- Integrated cassette I/O ports (2)
- 18 cassette storage in ISO class 3 environment
- Cassette transfer robot
- Wafer counter with cross/double slot detection
- Touch screen GUI display
- 4 color LED light tower on front panel
- Cassette + wafer weight limited to max 3.46 kg
Load Port Module (LPM):
- Load ports with cassette rotation (2)
Boat Handling Module (BHM)
- ISO class 3 environment with anti-static protection
- 2 Axis wafer transfer robot mounted on vertical track with MEMS end effector
- Configured for dual wafer carrier
- Wafer carrier elevator
Process Chamber Module (PCM)
- LPCVD up-flow process chamber
- 5 Zone heater configured for 100 to 800*C operation
- LPCVD plenum
- Pressure control manometers: 1000 Torr, 10 Torr, and 2 Torr
Rear Extension Module (REM)
- Ultra clean gas panel
- Unheated vacuum line with integrated isolation valve and throttle valve
- Vacuum pump interface with 100 ft connection cable
- x86 system control workstation
- PLC control system with x86 real-time computer
- SSPCs for temperature control
- Water distribution box
- Touch-screen GUI display with keyboard
- 4 color LED light tower on rear panel
- Configured for 208V incoming power
2021 Vintage

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