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Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System
Varian E 500 EHPI Ion Implant System

Varian E 500 EHPI Ion Implant System

Asset #: 128167

Make: Varian

Model: E 500 EHPI

Wafer Sizes: 6 inch

Last Confirm Date: January 30, 2025

Varian E 500 EHPI Ion Implant System, 6"
- Power: 208 V,50/60 Hz, 3 Phase
- CE Mark
- Connection: Top
- Source 1: IHC
- IHC Arc PS
- IHC Filament PS
- IHC Bias PS
- Extraction Electrode: EHP
- Bushing: EHP
- Extraction PS
- Source Magnet Polarity Switch
Gas Box:
- String #1 SDS
- String #2 SDS
- String #3 SDS
- String #4 HP
Beamline:
- Two Step Reducer
- Gauss Meter
- Terminal Pneumatics
- Auto Decel
- Total Beamenergy Probe
- Mirror PS
- Scan Amplifier
- Setup Cup Amplifier
End Station:
- Chuck system: ESC
- Dose Integrator
- DI Temp Monitor Controller
- Uniformity Controller
- Platen Tilt Servo Controller
- Scanning Faraday Controller
- Right Elevator Controller
- Left Elevator Controller
- Orienter Controller
- Uniformormity Controller
- Gauge Controller
- Right Arm Controller
- Left Arm Controller
- Scanning Faraday/Rotating Platen Controller
- Endstation Pneumatic Interface
- Right Handler Pneumatic Interface
- Left Handler Pneumatic Interface
- Linear Motor Servo Controller
Control System:
- Computer: Win7
- Software: V15.10.12
- Light Tower 
High Vac Pumps
- Source Turbo: Pfeiffer
- Analyzer Turbo: Pfeiffer
- Scanner Turbo: Pfeiffer
- Endstation Cryo
- LoadLock right: Cryo
- LoadLock left: Cryo
Dry Roughing Pumps
- Source/Terminal: Edwards Setup
- Differential Seal: Busch Scroll Fossa 15
- End station / Load Lock: Edwards Setup
Remote Facility Rack
- Cryo Comp: 9700A
- Motor Alternator
- DI Waterpump
2000 Vintage

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