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Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher
Applied Materials Centura II Etcher

Applied Materials Centura II Etcher

Asset #: 127722

Make: Applied Materials

Model: Centura II

Wafer Sizes: 8 inch

Last Confirm Date: January 17, 2025

Applied Materials Centura II Etcher, 8"
- 2 DPS / DTM Chambers
- SBC System Controller w/ Vita Controller Upgrade
- OTF
- Ebara System & Load Lock Pumps
- Configured for 200mm
- Used Minimally for R&D & Light Production
Load Lock / Cassette Configuration:
- LLK A & B: Wide Body
- LLK A & B Indexer and Handler Type: Platform
- LLK A & B Wafer Slide Detect: Present
Robots:
- Transfer Chamber: HP+
- Transfer Chamber Blade: Ceramic
Chamber Type / Location
- Chamber A & B Chamber Body Type: DPS - DTM
- Chamber A & B Process: Metal Etch
- Chamber A & B Heater / Pedestal Type: DPS Cathode ESC
- Chamber A & B Lid Type: DTCU w/ Dual Match
- Chamber A & B RF Generator: APEX 5513
- Chamber A & B Match: MKS GHW12A
- Chamber C, D & E Chamber Body Type: Blank
- Chamber C, D & E Process: N/A
- Chamber F Chamber Body Type: Orienter
- Chamber F Heater / Pedestal Type: Standard
Heat Exchanger Configuration
- 3 Thermal Chillers Model 0190-32036
- 1 SMC Chiller Model 0190-53161
Chamber A & B Gas Configurations:
- CF4
- O2
- CHF3
- N2
- SF6
- Ar
- HBR
- Cl2
- C4F8
2019 Vintage

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