{"product_id":"127673","title":"STS Multiplex ICP-DRIE (Inductively Coupled Plasma – Deep Reactive Ion Etcher)","description":"STS Multiplex ICP-DRIE (Inductively Coupled Plasma – Deep Reactive Ion Etcher)\u003cbr\u003e- 400V\u003cbr\u003e- 50Hz\u003cbr\u003e- 3 Phase\u003cbr\u003eWith:\u003cbr\u003e- MAG 900 CT turbopump\u003cbr\u003e- Power distribution \u0026amp; control rack cabinet with power distribution\u003cbr\u003e- Electrogrip electrostatic driver\u003cbr\u003e- vAT PM-7 adaptive pressure controller\u003cbr\u003e- Leybold Mag Drive 1000 pump controller\u003cbr\u003e- ENI ACG-10B RF generator\u003cbr\u003e- ENI ACG-3B-06 RF generator\u003cbr\u003e- ENI VL-400 phase shift controller\u003cbr\u003e- PowerBright VC-2000 step-up\/down transformer\u003cbr\u003e- BOC Edwards iQDP-80 roughing pump\u003cbr\u003e- Neslab RTE-211 recirculating chiller\u003cbr\u003e- Gas cabinet\u003cbr\u003e- LEP300 control server\u003cbr\u003e- Configured for 3in substrates\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44821591359678,"sku":"127673","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_1d7d3991-cf74-4f38-aee1-1c4db2ab5004.jpg?v=1743629547","url":"https:\/\/www.bridgetronic.com\/products\/127673","provider":"Bridge Tronic Global","version":"1.0","type":"link"}