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Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool
Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool
Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool
Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool

Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool

Asset #: 127604

Make: Applied Materials

Model: UVision SP 200

Wafer Sizes: 12 inch

Last Confirm Date: February 11, 2026

Applied Materials UVision SP 200 Brightfield Wafer Inspection Tool, 12"
- 3 Phase
- 5 Wire
- 50/60 Hz
- Designed to inspect pattern wafers, but it can also inspect bare and unpatterned wafers
- Ligth source: Laser ( 266 Χ’ =nm)
- Tool scans a wafer in a meander path
- Die to Die ” and Cell to Cell ” comparison capability
- Can use reflected --( BrigthField ) and scattered signal (GF = GreyField ) in parallel for detection
- On pattern wafers capable of detecting defects of 25 nm with 90 %
- Capture Rate (Data from D&E recipe
2007 Vintage

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