{"product_id":"127223","title":"Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition), up to 8\"\u003cbr\u003e- Process Chamber Inside-Kit\u003cbr\u003e- Loadlock (Outside \u0026amp; Inside)\u003cbr\u003eGas supply (PECVD):\u003cbr\u003e- MFC_MKS 1479A: corrosive gas: 5%SiH4\/N2, NH3\u003cbr\u003e- MFC_MKS 1179A: non-corrosive gas: CF4, N2, N2O\u003cbr\u003eGas supply (ICP-RIE):\u003cbr\u003e- MKS 1479A: corrosive gas: Cl2, BCl3 , HBr (SiCl4)\u003cbr\u003e- MKS 1179A: non-corrosive gas: O2, Ar, SF6\u003cbr\u003e- (415V Heated Gas Kit : required as SiCl4, BCl3, C4F8)\u003cbr\u003e- Chiller\u003cbr\u003e- Power Transfer\u003cbr\u003e- PC\u003cbr\u003e- Pump\u003cbr\u003e2009 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44821567307966,"sku":"127223","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/27_34d028de-7f43-4777-a7d8-0e7ba6279653.jpg?v=1739734702","url":"https:\/\/www.bridgetronic.com\/products\/127223","provider":"Bridge Tronic Global","version":"1.0","type":"link"}