Skip to content
Skip to product content
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 127223

Make: Oxford

Model: Plasmalab 100 ICP 380

Wafer Sizes: 2, 3, 4, 5, 6, 8, 12 inch

Oxford Plasmalab 100 ICP 380 PECVD (Plasma-Enhanced Chemical Vapor Deposition), up to 8"
- Process Chamber Inside-Kit
- Loadlock (Outside & Inside)
Gas supply (PECVD):
- MFC_MKS 1479A: corrosive gas: 5%SiH4/N2, NH3
- MFC_MKS 1179A: non-corrosive gas: CF4, N2, N2O
Gas supply (ICP-RIE):
- MKS 1479A: corrosive gas: Cl2, BCl3 , HBr (SiCl4)
- MKS 1179A: non-corrosive gas: O2, Ar, SF6
- (415V Heated Gas Kit : required as SiCl4, BCl3, C4F8)
- Chiller
- Power Transfer
- PC
- Pump
2009 Vintage

Recommended Products


Equipment Sourcing:

Unmatched Expertise in Global Procurement

See More of Our Equipment

At Bridge Tronic Global, we leverage our extensive network and industry expertise to source high-quality semiconductor manufacturing equipment from trusted suppliers worldwide. Whether you're looking for cutting-edge technology or reliable pre-owned equipment, our sourcing capabilities ensure that you receive the best options tailored to your needs.

We understand that every client's requirements are unique, so we prioritize transparency, thorough vetting, and a deep understanding of the global market to secure the right equipment for your operations. Our team is dedicated to delivering timely, cost-effective solutions without compromising on quality or performance.


Wafer test machine

Refurbishment: Restoring Excellence, Maximizing Value

At Bridge Tronic Global, our refurbishment services breathe new life into used semiconductor manufacturing equipment, ensuring peak performance at a fraction of the cost. Our expert technicians meticulously restore equipment from leading brands like KLA and Hitachi, applying rigorous testing and quality control measures. Whether you need a single piece refurbished or a fleet of equipment overhauled, we deliver reliable, high-performing solutions that extend the lifespan of your assets while optimizing your budget.

Cart

Your cart is currently empty