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KLA Surfscan 6400 Particle Defect System
KLA Surfscan 6400 Particle Defect System

KLA Surfscan 6400 Particle Defect System

Asset #: 126676

Make: KLA

Model: Surfscan 6400

Wafer Sizes: 6 inch

Last Confirm Date: December 13, 2024

KLA Surfscan 6400 Particle Defect System, 6"
- 1 Phase
- 208V, 17A, 60Hz
- Greater than 0.20um
- Greater than 0.10um @ 95% capture rate
- Count repeatability error, less than 1.5%
- Count greater than 500, 0.364um diameter latex spheres on bare silicon
- 0.1um to 100um in a single measurement
- Up to 120 wafers per hour(150mm), 95 wafers
(200mm)
- Less than 0.005 particles/cm2 greater than 0.15um  diameter per single pass in a class 10 cleanroom
- Single puck handling from cassette or platform
- 30mW Argon=Ion laser, 488nm wavelength
1994 Vintage

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