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Axcelis NV GSD 200 Ion Implanter
Axcelis NV GSD 200 Ion Implanter
Axcelis NV GSD 200 Ion Implanter
Axcelis NV GSD 200 Ion Implanter

Axcelis NV GSD 200 Ion Implanter

Asset #: 126619

Make: Axcelis

Model: NV GSD 200

Wafer Sizes: 6 inch

Last Confirm Date: December 12, 2024

Axcelis NV GSD 200 Ion Implanter, 6"
- 3 Phase
- 208V, 710A
- Gases: B/As/Ar
- Total energy: 200 KEV
- Throughput: 210 pieces/hour
Features:
- (25) Slots cassette
- (4) cassettes capacity
- ELS source head
- (2) SUN Workstations
- VME 177 cell controller
- (2) SDS gas lines (ASH3 and PH3)
- (2) HP Gas lines (BF3 and ARGON)
- P-Shower Electron shower
- Post acceleration high voltage, 80 KEV
- Belt type rotary drive
- Variable implant angle, 2-Axis
- Real time patented dose controller
- 5E11~1E16 Ions/cm2 dose range
- Arm Std Arm 150mm
- Wafer Holder Std 150mm
- Beam energy: 5 KeV
- Beam Current: 50 mACE marked

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