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Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter
Applied Materials PI 9500 Ion Implanter

Applied Materials PI 9500 Ion Implanter

Asset #: 126339

Make: Applied Materials

Model: PI 9500

Wafer Sizes: 6 inch

Applied Materials PI 9500 Ion Implanter, 6"
- Belt Drive
- 60 Hz
- Utilities: Top feed
- Water fittings: Imperial
- Remote distance: 6m umbilical
- Layout: Thru wall
- Wafer cassette: 26 wafers
- Leybold Turbo pumps
- Ebara A07V Mech pump
- CTI Cryo pump, rear cryo compressor missing, 9600 model
- Helium line length: 15 m
- Factory interface: SECS / GEM
- Tilt angle: Variable 0-7 degree
- Standard 25 wfr wheel
- Plasma Flood System: HDPFS
- Beamline: Standard
- Source type: Bernas
- Front plate: Tungsten
- Extraction type: Single bellows
- Source chamber liners
- MRS Chamber Liners
- Gas position 1: Boron (gas module missing)
- Gas position 2: n/a (gas module missing)
- Gas position 3: Phosphine
- Gas position 4: Arsine
Missing:
- Wafer Loader Blade Control PCB
- Spin Control PCB
- Spin/Scan Control PCB
- MRS turbo
- PFG Argon feed through Wheel chamber
- Rear Cryo
- Spin Motor gear/coupler
- Blade carriage bearing arm
- Front monitor
- Isolation Transformer Breaker (term PD)
- Scan arm work
- PFG Filament PSU
- Filament PSU
- Beam stop Shield Interlock switch
- Wheel Index PCB (Wheel Chamber)
- Missing two Wheel chamber Plexiglas windows
- Wafer on Blade sensor
- Fast Wheel Index Sensor
- Gas Modules
- TFT monitor upgrade
Parts Machine
1995 Vintage

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