{"product_id":"126184","title":"Lam Rainbow 4526 XL Plasma Etcher","description":"Lam Rainbow 4526 XL Plasma Etcher, 6\", 8\"\u003cbr\u003e- Oxide Etch\u003cbr\u003e- Wafer type: Jeida flat\u003cbr\u003e- Valve type: VAT 65\u003cbr\u003e- ESC\u003cbr\u003e- Monochromator Endpoint\u003cbr\u003e- Software: Envision 1.6.1-005\u003cbr\u003e- RF: ENI-GHW50 \/ ENI-2MHz\u003cbr\u003e- RF Cart\u003cbr\u003e- Robot: Harmonic Drive\u003cbr\u003e- Loader: Hine Indexers 38A\u003cbr\u003e- Loadlock: Entrance \u0026amp; Exit LL\u003cbr\u003e- Turbo Pump: HGP Pump\u003cbr\u003e- Controllers: HGP \/ VAT 65\u003cbr\u003e- AC Rack\u003cbr\u003eGas Chamber:\u003cbr\u003e- Ar 485,0 sccm\u003cbr\u003e- CF4 20.0 sccm\u003cbr\u003e- CHF3 20.0 sccm\u003cbr\u003e- C4F8 19,5 sccm\u003cbr\u003e- CO 200.0 sccm\u003cbr\u003e- O2 LOW 20.0 sccm\u003cbr\u003e- O2 HIGH 1000.0 sccm\u003cbr\u003e- N2 100.0 sccm\u003cbr\u003e2000 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45409798652094,"sku":"126184","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_c9184e65-1ed0-4d8f-bd86-69db230e25f5.jpg?v=1757976314","url":"https:\/\/www.bridgetronic.com\/products\/126184","provider":"Bridge Tronic Global","version":"1.0","type":"link"}