{"product_id":"126166","title":"Lam Rainbow 4506 I Plasma Etcher","description":"Lam Rainbow 4506 I Plasma Etcher, 6\", 8\"\u003cbr\u003e- Oxide Etch\u003cbr\u003e- Wafer type: Jeida flat\u003cbr\u003e- Valve type: AC4 Throttle \/ VAT Throttle\u003cbr\u003e- Monochromator Endpoint\u003cbr\u003e- Software: Classic 7.31-42\u003cbr\u003e- RF: PDW2200 400Kc generator (main chamber)\u003cbr\u003e- RFG1250 13.56MHz (ISO chamber)\u003cbr\u003e- RF Cart\u003cbr\u003e- ISO Module\u003cbr\u003e- Robot type: Harmonic Drive\u003cbr\u003e- Loader type: Hine indexers 38A\u003cbr\u003e- Loadlock: Entrance (ISO chmbr) and Exit LL\u003cbr\u003e- Turbo pumps: No\u003cbr\u003e- Controllers: VAT controller ISO THV \/ AC4 controller main chamber THV\u003cbr\u003e- GAS 1: Ar: 500 sccm\u003cbr\u003e- GAS 2: CF4: 100 sccm\u003cbr\u003e- GAS 3: CHF3: 50 sccm\u003cbr\u003e- GAS 4: He: 1000 sccm\u003cbr\u003e- GAS 5: O2: 20 sccm\u003cbr\u003e- GAS 6: N2: 540 sccm\u003cbr\u003e- GAS 7: NF3: 1150 sccm\u003cbr\u003e- GAS 8: He: 480 sccm\u003cbr\u003e1995 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45409799176382,"sku":"126166","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1_933d02ff-3b2b-4400-8d80-c073210183ef.jpg?v=1757976226","url":"https:\/\/www.bridgetronic.com\/products\/126166","provider":"Bridge Tronic Global","version":"1.0","type":"link"}