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Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher
Lam Rainbow 4506 I Plasma Etcher

Lam Rainbow 4506 I Plasma Etcher

Asset #: 126166

Make: Lam

Model: Rainbow 4506 I

Wafer Sizes: 6, 8 inch

Lam Rainbow 4506 I Plasma Etcher, 6", 8"
- Oxide Etch
- Wafer type: Jeida flat
- Valve type: AC4 Throttle / VAT Throttle
- Monochromator Endpoint
- Software: Classic 7.31-42
- RF: PDW2200 400Kc generator (main chamber)
- RFG1250 13.56MHz (ISO chamber)
- RF Cart
- ISO Module
- Robot type: Harmonic Drive
- Loader type: Hine indexers 38A
- Loadlock: Entrance (ISO chmbr) and Exit LL
- Turbo pumps: No
- Controllers: VAT controller ISO THV / AC4 controller main chamber THV
- GAS 1: Ar: 500 sccm
- GAS 2: CF4: 100 sccm
- GAS 3: CHF3: 50 sccm
- GAS 4: He: 1000 sccm
- GAS 5: O2: 20 sccm
- GAS 6: N2: 540 sccm
- GAS 7: NF3: 1150 sccm
- GAS 8: He: 480 sccm
1995 Vintage

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