{"product_id":"126163","title":"Lam Rainbow 4526 I Plasma Etcher","description":"Lam Rainbow 4526 I Plasma Etcher, 6\", 8\"\u003cbr\u003e- Oxide Etch\u003cbr\u003e- Wafer type: Jeida flat\u003cbr\u003e- Valve type: AC2 throttle valve\u003cbr\u003e- no ESC\u003cbr\u003e- Monochromator Endpoint\u003cbr\u003e- Software: Envision 1.6.1-005\u003cbr\u003e- RF Cart\u003cbr\u003e- ISO Module\u003cbr\u003e- RF: PDW2200 400Kc generator (main chamber)\u003cbr\u003e- RF: RFG1250 13.56MHz (ISO chamber)\u003cbr\u003e- Robot: Harmonic Drive\u003cbr\u003e- Loader: Hine Indexers 38A\u003cbr\u003e- Loadlock: Entrance (ISO chamber) and Exit LL\u003cbr\u003e- GAS 1: Ar: 500 sccm\u003cbr\u003e- GAS 2: CF4: 100 sccm\u003cbr\u003e- GAS 3: CHF3: 50 sccm\u003cbr\u003e- GAS 4: He: 1000 sccm\u003cbr\u003e- GAS 5: N2: 50 sccm\u003cbr\u003e- GAS 6: O2: 20 sccm\u003cbr\u003e- GAS 7: He: 500 sccm\u003cbr\u003e- GAS 8: NF3: 500 sccm\u003cbr\u003e1995 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":45409803796670,"sku":"126163","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2_6fa3e8ee-7763-4b0b-a049-17c98fe808f3.jpg?v=1757977419","url":"https:\/\/www.bridgetronic.com\/products\/126163","provider":"Bridge Tronic Global","version":"1.0","type":"link"}